COBRA DS 0080 / 0160 G
Advanced Screw Design
Efficient:
cost-effective, minimal maintenance, high uptime
Flexible:
application-oriented
Short Process Times:
due to high pumping speeds
Robust:
anti-corrosion coating on internal components
Compact Design
COBRA DS 0080/0160 G are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat screens and semiconductors. State-of-the-art COBRA DS screw vacuum pump technology allows powder- and particle-laden media to be evacuated.
COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.
Equipped with high-efficiency motors, the COBRA DS 0080/0160 G offer excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.
Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.
Applications
High-density plasma CVD (HDP-CVD)
Rapid thermal processing (RTP)
Sub-atmospheric CVD (SACVD)
Metal-organic CVD (MOCVD)
Plasma-enhanced CVD (PECVD)
Low-pressure CVD (LPCVD)
Atomic layer deposition (ALD)