Screw vacuum pump COBRA BC 0200 F

drycompact

COBRA BC 0100 / 0200 F Advanced Screw Design: bell shaped construction, patented self-balancing screws Efficient: low operating costs, energy-efficient, minimal maintenance, high uptime Reliable: operationally reliable Flexible: application-oriented Quiet: noise level < 58 dB(A) Compact Design The COBRA BC 0100/0200 F are dry screw vacuum pumps in the proven COBRA BC series. State-of-the-art screw vacuum pump technology featuring a specially developed screw profile sets new standards of efficiency, making these vacuum pumps the ideal solution for tasks in load lock and transfer chambers, as well as in processes such as metrology, lithography, physical vapour deposition (PVD) and rapid thermal annealing (RTA). Due to the sophisticated bell shaped cantilever construction, the twin rotor with variable pitch screws is mounted only on the motor side, while the unique “flying bearing” design makes inlet bearings unnecessary. As a result, the pumped medium does not come in contact with the bearings. This ensures clean vacuum generation and allows the full recovery of pumped gases. The direct gas path between inlet and outlet prevents dead spaces and ensures there are no process deposits inside the compression chamber. The patented self-balancing screw design and screw rotor mounted precisely at the centre of gravity ensure excellent running qualities and guarantee high uptime. A directly mounted canned motor makes the dimensions of the COBRA BC series very compact.