Materials analysis microscope ZEISS ORION NanoFab

digital camerahelium ion beam

The ORION NanoFab is a 3-in-1 multibeam ion microscope, designed for sub-10nm nanostructure fabrication using the NanoPatterning and Visualization Engine, and other applications. It features three beam types that users can seamlessly switch between, namely, gallium, helium and neon beams. The gallium FIB is suitable for removing mass material in a substance sample. The helium beam, on the other hand, is ideal for fabricating sub-10 nm structures. The neon beam enables users to form nanostructures at highly efficient speeds with high throughput. The NanoFab has a high imaging resolution of 0.5 nm, enabling high resolution images of samples using the same instrument.