Dimensional measurement result viewing, analysis and reporting software CorrMeas

CorrMeas is a powerful software platform designed to streamline and automate microscopy workflows from precise stage navigation and multi-modality image acquisition to intelligent image analysis and reporting. Whether you're working with Scanning Electron Microscopes (SEM), light microscopy, or integrating multiple modalities, CorrMeas helps you reduce manual tasks, increase throughput, and achieve reproducible results, typically at lower costs than comparable solutions. - Coordinate-Synchronized Imaging: Automatically align and capture images across different microscopes and sessions. - Visual and Tabular Workflow Control: Manage samples, defects, and imaging parameters with intuitive graphical and tabular interfaces. - Automated Image Processing: Apply custom filters, normalize images, and extract measurements with repeatable scripts. - Integrated Support for SEM, AFM & Light Microscopy: Compatible with ZEISS SEMs and other microscopes for seamless operation. CorrMeas is wafer inspection software. The typical application areas are: - Automated or Semi Manual Defect Review - Automated Critical Dimension Measurements - Wafer Navigation Proven and Trusted by Industry Leaders CorrMeas has been enabling advanced microscopy automation for over a decade. Initially marketed only through the ZEISS sales network, it has been successfully deployed in numerous industrial analysis labs, particularly within the semiconductor sector. Originally developed with a focus on defect review, CorrMeas quickly evolved with a broad set of features to support critical dimension measurements and intuitive workflow creation - even without programming skills. CorrMeas was built to meet the demanding needs of industrial environments - where reliability, speed, precision, and the ability to adapt to each local setup are critical. Visual Navigation & Coordinate Control CorrMeas offers a combined graphical and tabular view of all sample positions and acquired images. With background images, GDS files or KLARF files, users can navigate samples precisely and intuitively. - Live SEM overlay with crosshair tracking - Manual or automated coordinate alignment - One-click defect targeting and labeling Image Acquisition & Device Integration CorrMeas supports all ZEISS scanning electron microscopes and ZEISS Axio Imager Light Microscopes, ScanTool for AFMs (DME), and any DirectShow or Windows Media Foundation image sources with motorized stages. It automates imaging, focusing, stage movement with high precision and supports automatic position finding. - AFM, SEM and Light Microscope control, full API support for ZEISS SEMs - Live view integration and image overlays - Support for KLARF file import - Highly reliable automatic focus and stigmator setting for SEM - Automatic positioning utilizing reference images or GDS file shapes - The system lets you interactively record automation steps Image Processing & Analysis The built-in Image Filter Designer supports automated measurements such as feature width, line edge roughness, or shape detection via interactive filtering pipelines. - Edge detection, thresholding, area detection - Automated width & line roughness evaluation - Script generator for automation integration - Testing your filters on the live image Hardware Addons CorrMeas can be combined with specialized hardware extensions to enable advanced automation workflows. This includes robotic modules for fully automated sample loading, positioning, and transfer between imaging systems. The flexible architecture allows integration with third-party control units, making CorrMeas ideal for custom automation in high-throughput or unattended environments. Standard automation modules such as airlock interfaces are available, but in most cases, custom designs are required depending on the sample type, container format, and measurement process. In addition to the software, specially designed hardware components for advanced automation needs are also offered. Distribution The software is distributed as a lightweight, standalone executable, eliminating the need for bulky software installations or external dependencies. This streamlined design ensures exceptional stability and resilience to system or driver updates - a key advantage in industrial microscopy environments. CorrMeas comes with full startup support and tailored training to get you productive from day one. CorrMeas supports microscope systems from various manufacturers, ensuring broad compatibility and flexibility. Thanks to the close cooperation between ZEISS Microscopy and DoubleFox, more advanced and complex automation scenarios can be efficiently addressed on ZEISS platforms. CorrMeas is available either directly from DoubleFox or through local ZEISS representatives.