filter gas purifier

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filter gas purifier filter gas purifier - Luminousgard™


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Luminousgard™ Gas Purifiers
For hydrocarbons, acids and amines removal in lithography applications

Effectively removes the following impurities in purge gas: CDA, N2, Ar and He
Maintains high retention in the following volatile impurities: Hydrocarbons (>C6); Acids - SO2, SO3, NO2, HCI, HF, Ch3COOH, H2S; Amines - NH3, CH3NH2, (CH3)3N
Excellent initial cleanliness: Less than 1 ppb of hydrocarbons (>C6) degassing at 1 SLPM
Effectively removes particles in gas stream
Can be used without power or heat required
Various models for various flow rate