CD1000 Nanofics S/SE
Process chamber Material: aluminium
Inside dimensions: 1000 x 700 x 700 mm
Volume: 490 liter
Tray: 3, with dimensions 858 x 672 mm or custom design.
Vacuum measurement Baratron gauge
Generator Custom design for Nanofics application
Pumping system Dry pump group
PLC The equipment and automatic processing is fully controlled by an
industrial PLC. The HMI (user interface) runs over an industrial touch
panel PC having following properties:
17” touch screen.
Integrated SSD hard drive.
The HMI offers following functionalities:
Process & Instrumentation Diagram showing real-time machine
User-level based log on for managing user rights from operator to
Recipe management system offering unlimited number of recipes,
each recipe representing a unique set of process parameters.
Optional historical data logging and viewing.
Electricity 380V AC, 50Hz, 40A
Process gas 2 gas lines with MFC (Mass Flow Controller) for S coating
3 gas lines with MFC (Mass Flow Controller) for SE coating
Safety features Emergency-off-switch, vacuum interlock, over temperature interlock,
Process gas connection ¼’’-Swagelok-fitting, input pressure 1 Bar
Options: data logging, additional gas channels, customised loading tray