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coating machine
CD1836 Nanofics

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coating machine coating machine - CD1836 Nanofics
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Description

Process chamber Material: aluminium
Inside dimensions: 1600 x 1350 x 850 mm
Volume: 1836 liter
Slots: 4, with dimensions 1000 x 285 mm, each slot
can hold multiple trays of 285 x 756
Vacuum measurement Baratron gauge
Generator Custom design for Nanofics application
Pumping system Dry pump group
PLC PLC with touch screen
The PLC:
- runs the process automatically
- defines different processes as recipes
- checks pump pressure, pump time, gas flow,
working pressure, process time, temperature,
forward power of the generator
- monitors all parameters correctly within preset %
of the machine settings
- uses an operator, process/maintenance password
Electricity 380V AC, 50Hz, 63A
Process gas 1 gas line with MFC (Mass Flow Controller)
Safety features Emergency-off-switch, vacuum interlock, over
temperature interlock, CE-label
Process gas connection ¼’’-Swagelok-fitting, input pressure 1 Bar
Options: data logging, additional gas channels, customised loading tray

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