plasma surface treatment machine / laboratory
Process chamber Material: aluminium
Inside dimensions: 300 x 300 x 300 mm
Volume: 27 liter
Tray: 3, with dimensions 205 x 260 x 40 mm
Vacuum measurement Pirani gauge
Generator 300 W kHz
Pumping system Rotary vane roughing pump
PLC The equipment and automatic processing is fully controlled by an
The HMI (user interface) runs over an industrial touch panel PC having
15” touch screen.
Integrated SSD hard drive.
The HMI offers following functionalities:
Process & Instrumentation Diagram showing real-time machine
User-level based log on for managing user rights from operator to
Recipe management system offering unlimited number of recipes,
each recipe representing a unique set of process parameters.
Optional historical data logging and viewing.
Electricity 380V AC, 50Hz, 40A
Process gas 1 gas line with MFC (Mass Flow Controller).
Safety features Emergency-off-switch, vacuum interlock, over temperature interlock,
Process gas connection ¼’’-Swagelok-fitting, input pressure 1 Bar
Options: data logging, additional gas channels, dry pump group, customised loading tray