Active vacuum gauge BAG402
without display

active vacuum gauge
active vacuum gauge
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Characteristics

Technology
active
Display
without display
Vacuum range

Max.: 0.027 mbar
(0.000391602 psi)

Min.: 0 mbar
(0 psi)

Description

BAG402 Medium to Ultra-High Vacuum Gauge The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package. The unique, supported dual filaments offer superior accuracy, longtermstability and longevity. Benefits Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr) Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5% Overpressure detection protects the filament from premature burnout Two long-life yttrium oxide coated iridium filaments Automatic emission current selection reduces control complexity Easy to exchange sensing element with on-board calibration data guarantees high reproducibility RoHS compliance Typical Applications Pressure measurement in semiconductor process and transfer chambers Industrial coating General vacuum measurement and control in the low to ultra high vacuum range

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