process gas analyzer / gas / noise / for integration
Transpector 2

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Characteristics

  • Measured entity:

    process gas, gas

  • Measured value:

    noise

  • Configuration:

    for integration

Description

The Transpector® Gas Analysis System provides accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection in semiconductor manufacturing. In the Transpector 2, increased hydrogen sensitivity makes contaminants visible at sub-ppm levels, and four times faster scanning over low level signals with an expanded dynamic range provides cleaner data at lower detectable partial pressures.

Features at a Glance

100-,200-,and 300-amu systems with Faraday cup or combination electron multiplier/Faraday cup
improved hydrogen detection
superior peak amplitude and position stability
up to 10 times improvement in signal to noise ratio compared to original Transpector
faster scanning over low-level signals
nine-decade electronic dynamic range
software options for single and multi-chamber systems
partial pressure measurement from 1 X 10 -4 Torr to 5 X 10 -15 Torr