2-axis inclination sensor / digital / capacitive / MEMS
Number of axes:
Min.: -90 °
Max.: 90 °
0.0015 °, 0.004 °
The capacitive inclination sensors from First Sensor are based on single crystal silicon and utilize the latest micromachining technology. The devices achieve large signal-to-noise ratios and excellent stability over temperature which allows them to detect smallest changes in inclination. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.