Optical microscope C11222-16

inspectionnear-infrareddigital camera

The PHEMOS-1000 is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by semiconductor device defects. Since the PHEMOS-1000 is usable in combination with a general-purpose prober, you can do various analysis tasks by using the sample setups you are already familiar with. Installing an optional laser scan system allows acquiring high-resolution pattern images. Different types of detectors are available for various analysis techniques such as emission analysis, thermal analysis, and IR-OBIRCH analysis. The PHEMOS-1000 supports a wide variety of tasks and applications ranging from prober socket boards to a large-size 300 mm wafer prober. Features • Two ultra-high sensitivity cameras mountable • Lasers for up to 3 wavelengths and a probe light source for EOP are mountable • Equipped with optical stage suitable for diverse samples Options • Includes laser scan system • Emission analysis with high-sensitivity near-infrared camera • Thermal analysis with high-sensitivity mid-infrared camera • IR-OBIRCH analysis • Dynamic analysis by laser irradiation • EO probing analysis • High-resolution and high-sensitivity analysis using NanoLens • Connects to CAD Navigation • Connects to LSI tester