analysis microscope / for research / TEM / high-resolution



  • Technical applications:

    for analysis, for research

  • Type:


  • Other characteristics:

    high-resolution, for materials analysis, for semiconductors, for materials research, for metrology applications, for nanotechnology, for holography, ultra-high resolution, high-magnification, holographic


Hitachi's unique 200 kV aberration-corrected TEM/STEM: the perfect harmony of imaging resolution and analytical performance

0.078 nm spatial resolution in STEM is achieved together with high specimen-tilt capability and large solid angle EDX detector(s), all in a single objective lens configuration.
The HF5000 builds on features from Hitachi HD-2700 dedicated STEM including Hitachi's own fully automated aberration corrector, symmetrical dual SDD EDX and Cs-corrected SE imaging. It also incorporates the advanced TEM/STEM technologies developed in the HF series.
Integrating these accumulated technologies into a new 200 kV TEM/STEM platform results in an instrument with an optimum combination of sub-Å imaging and analysis, as well as the flexibility and unique capabilities to address the most advanced studies.

※With monitor screens embedded and 2nd monitor option.

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