Delivery system LU-4000

POCl3 Auto Refill System FDM Series HORIBA's Award Winning Fluid Delivery System (FDM Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3 in 20 litre ETFE lined stainless steel canisters to multiple fixed plastic bubbler vessels. The FDM and VM series are used for n-type diffusion layers as a dopant in manufacturing crystal silicon-based solar cell. The system can also be used in the BBr3 diffusion process, improving process stability, increasing uptime, reducing logistics and labour costs and higher safety. Segment: Semiconductor Division: Fluid Control System Manufacturing Company: HORIBA STEC Co. Ltd.