gas analyzer / process gas / pressure / for integration
Transpector® XPR3

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Characteristics

  • Measured entity:

    gas, process gas

  • Measured value:

    pressure

  • Configuration:

    for integration

  • Other characteristics:

    monitoring, compact, real-time, high-pressure, process

Description

RGA process monitoring with Transpector XPR3 can provide you with real-time data on contamination levels, outgassing levels, gas purity and equipment operation. This information can be used to maximize throughput and yield, reduce waste by detecting and diagnosing problems, and increase tool uptime by making preventive maintenance programs more efficient and effective.

Transpector XPR3 is the next generation in high-pressure, quadrupole-based process gas analysis. It builds on the success of previous INFICON systems to allow monitoring of physical vapor deposition (PVD) processes with unprecedented sensitivity, accuracy, and flexibility. A series of technological breakthroughs allow the compact Transpector XPR3 to operate from 20 mTorr to ultrahigh vacuum without the need for large, complex pressure conversion equipment.