XY positioning system / linear / industrial / multi-function
Number of axes:
industrial, multi-function, for the semiconductor industry, for wafer inspection and metrology
compact, servo controlled, large aperture
MICROSCOPE OPEN FRAME XY STAGE
APERTURE from 10 mm to 400 mm
Open-frame XY stages designed with a low profile for a wide range of automated accurate positioning in microscope-based applications. The drive mechanism located on the side of the unit and offers a clear unobstructed two axes aperture to enable light or objects to pass through the center of travel.