Pre-alignment module

Single Axis Logosol Prealigner "Embedded" Description The Logosol prealigners are innovative, high precision, class 1 compatible Logosol prealigner solutions with integrated scan electronics. The Logosol prealigners are proprietary products of Logosol, Inc. USA www.logosolinc.com Characteristics alignment times < 2.5 seconds contactless measurement using LED and CCD sensor integrated scanning electronics chuck load change to another wafer size without rebuild transparent, semi-transparent, holed and opaque wafers can be aligned All, flat and notch wafer specifications for wafer sizes from 3" to 12" connection panel available at the side and from below