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Articulated robot TTS20
5-axishandlingfor clean rooms

articulated robot
articulated robot
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Characteristics

Type
articulated
Number of axes
5-axis
Function
handling
Application domain
for clean rooms
Other characteristics
high-speed, high-precision
Reach

1,066 mm (41.97 in)

Repeatability

0.1 mm (0.0039 in)

Description

The TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision. In addition, its rigid telescopic mechanism delivers high-speed handling in high and low positions. The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.