Temperature measuring system Thermal TRACK™ 5

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The Thermal TRACK™ 5 data acquisition system supports in situ wafer temperature measurements from the wired SensArray® Process Probe™ instrumented wafer products. The Thermal TRACK 5 system combines the wireless ISIS 5 (Intelligent Sensor Interface System) data acquisition unit with a handheld personal digital assistant for real-time visualization and logging of data for the characterization of temperature profiles. By providing informative graphic representations of wafer temperature during ramp-up, steady state, and cool-down, Thermal TRACK 5 provides a quick and cost-effective method for managing most processes. This portable system provides high accuracy, precision and resolution for both transient and steady-state measurements, providing critical data for fab engineers to calibrate and check temperature setpoints and run predefined preventive maintenance checks. Applications Process tool monitoring