3D profilometer Tencor™ P-7

stylusroughnessbenchtop

The Tencor P-7 benchtop stylus profiler builds on the success of the market leading Tencor P-17 benchtop stylus profiling system. It includes the superior measurement performance of the P-17 technology in a platform that offers a great price-to-features ratio for a benchtop stylus profiler. The Tencor P-7 stylus profiler supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 150mm without stitching. Features • Step height: Nanometers to 1000µm • Low force with constant force control: 0.03 to 50mg • Scan full diameter of the sample without stitching • Video: 5MP high-resolution color camera • Arc correction: Removes error due to arc motion of the stylus • Software: Easy-to-use software interface • Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM Applications • Step height: 2D and 3D step height • Texture: 2D and 3D roughness and waviness • Form: 2D and 3D bow and shape • Stress: 2D and 3D thin film stress • Defect review: 2D and 3D defect surface topography