rotary positioning stage / piezoelectric / 1-axis
Number of axes:
15 µm, 35 µm, 70 µm
The Nano-P Series are piezo actuated, closed loop, linear translators featuring a unique flexure hinge design. Avanced electrical discharge machining process is adopted to entirely machine the flexure hinge from a single block of high strength titanium. This hinge is available for the first time on a tubular nanopositioner to ensure the highest degree of repeatability and load capability. Unlike its competitors, the Nano-P Series is free from internal Belleville springs. Since belleville springs are not friction-less, they do not provide superior repeatability of a true nanopositioner.
Nano-P Series features a true flexure spring guiding mechanism eliminating mechanical friction and suction. Nano-P Series is built of invar and titanium to achieve optimal combination of thermal stability and mechanical strength, making it ideal for the most demanding positioning and metrology applications. The series is available in three standard ranges of motion with integrated position sensors and uses proprietary PicoQ™ technology. This ensures absolute, repeatable position measurement with picometer accuracy under closed loop control. Custom systems are available on request.