MEMS flow sensor FM-200
gaswith integrated digital displayhigh-precision

MEMS flow sensor
MEMS flow sensor
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Other characteristics
analog output, high-precision, with integrated digital display


Panasonic has developed a new digital flow sensor with integrated display for a wide range of applications. The FM-200 series can control and effectively manage flows using a variety of output modes. The setting conditions appear on the sub display, making it much easier to keep track of operations. In addition, the 2-color digital display lets you check the sensor’s operation status at a glance. A new rectification mechanism and Micro Electro Mechanical System (MEMS) technology allow the sensor to be mounted on a silicon sensor chip and result in an extremely small heat capacity, high precision of ±3% F.S. and high-speed response. Two temperature sensors, one on either side of the heater, detect heat distribution and make bidirectional detection possible. Characteristics: • Easy-to-read 2-color display with sub display • High precision of ±3 % F.S. • One sensor for both intake and exhaust • High flow-rate type for up to 1000 l/min • Integrated value reset function • Analog voltage and digital outputs • Key lock function • Rattle prevention function (response time setting) • Display rate setting • ECO mode Options: • Sensor mounting brackets • Panel mounting brackets
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