LED type wafer alignment sensor
The HD-T1 series is a new wafer alignment sensor. The use of a safe LED light beam now allows for high precision detection with a resolution of 30µm. The sensor is best suited to detect wafer eccentricity, notches and orientation flats. Using linear image sensor methodology and high-speed sampling technology, a wide variety of objects can now be stably measured with great precision at ultra-high speeds. This CCD style sensor is developed for using in almost all fields of industry, e.g. tire manufacturing or semiconductor production (wafer printed circuit boards).
• No safety measures are required
• High resolution of 30µm
• Easy installation
• No need for beam axis alignment
• Low current consumption of 70mA or less
• Adjustment functions for both span and shift have been incorporated