Thermal mass flow controller series II
for gasfor chemicalsdigital

thermal mass flow controller
thermal mass flow controller
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for gas, for chemicals
Other characteristics
digital, analog, precision, for OEM
Flow rate

Min.: 0 l/min (0 us gal/min)

Max.: 1,670 l/min (441 us gal/min)


Min.: 0 psi

Max.: 10,000 psi


Series II Product Features: Gas flow ranges from 0 – 0.7 ml/min to 0 – 1670 l/m Operating pressures up to 10,000 PSIG Exceptionally Precise: Best in Class Accuracy and repeatability for multi-range, multi-gas thermal mass flow High Turndown and Low Pressure Drop Low Response Time (6x faster than previous) Quick Gas Changeover using Flow Parameter Adjustment with storage of up to 8 gas-type/flow range selections (available ≤150 PSIG) User friendly configurable characteristics – gas type, tag name, alarm and setpoint adjustment Effective turndown range of 180:1 Analog or digital communications: RS-232, EtherCAT, DeviceNet, Profibus-DP, Modbus-RTU, Flowbus 500/600 SERIES II Digital Mass Flow take Parker MFCs and MFMs to an even higher level of quality, versatility and cost effectiveness to digital mass flow. Series II features expanded flow ranges (from 0.014 - 0.7 ml/min up to 33 - 1670 l/min) and can be factory configured to include up to 8 gas type and flow range combinations. Models are available with maximum operating pressures up to 10,000 PSIG. In addition to the standard analog I/O signals (4-20 mA/0-5 VDC/0-10 VDC and RS232 connection), EtherCAT, DeviceNet™, Profibus-DP® and Modbus communication protocols are now available. Flow Parameter Adjustment (FPA) is the Series II’s most exciting feature. FPA offers increased flexibility by allowing user configuration of both flow range and gas type while maintaining high precision and high accuracy with more than 180:1 effective turndown range.
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