Vacuum coating application system Series 3000 LV 600/700

vacuum coating application system
vacuum coating application system
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Description

This is the Parylene system. It is a modular system divided into two parts: chamber module and evaporator module. Dimensions: - L: 2400mm W: 960 H: 1460mm Weight: - ~ 350 KG Volume: - 600 / 700 Liter Process chamber: - 800mm Ø H: 1100mm (600 Liter) / 1300mm (700 Liter) Plasma source: - 2,45GHz, 1200 Watt Inclusive: - 1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible Cooling system: - 8 liter (electromechanical Cool-trap) Vacuum connection: - DIN 63 ISO-KF Venting: - electromagnetic solenoid valve Pump system: - 75m³/h Electrical connection: - 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW

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