- Robotics - Automation - Industrial IT
- Automation
- Production automation system
- RoboTechnik Intelligent Technology Co., Ltd.
Production automation system PECVDprocess
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Characteristics
- Options
- for production, process
Description
Process :
● Apply to 156/230 size wafers
● Compatible to different sizes of tube PECVD equipment and plate PECVD equipment
Features :
● Loading and unloading ： Cassette or Stack
● Loading and unloading: Cassette or Stack
● Output: graphite boat
● Boat temperature monitoring
● Optional online color difference/film thickness detection, PL detection, debris detection,
● warped film detection, flip
● Optional support MES interface and remote debug function
● Intelligent machine, OEE statistics and energy consumption analysis function
● Standard boat temperature detection, vertical shooting boat, ceramic suction cup,
● single-channel vacuum
● Optional smart IGV interface
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.