electron beam evaporator / process
The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).
Vertically oriented compact UHV electron beam evaporator with DN63CF (4.5" OD) mounting flange and 4 cc / 5 cc hearth volume.
High purity e-beam evaporation
270 beam deflection
3 kW power
High frequency x-y-beam deflection system