electron beam evaporator / process
EBV-Series

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electron beam evaporator / process electron beam evaporator / process - EBV-Series
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Characteristics

  • Type:

    electron beam

  • Laboratory/process:

    process

Description

The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).

Vertically oriented compact UHV electron beam evaporator with DN63CF (4.5" OD) mounting flange and 4 cc / 5 cc hearth volume.

High purity e-beam evaporation
270 beam deflection
3 kW power
High frequency x-y-beam deflection system