The SMARPOD CLS-32 is equipped with Exchangeable Drive Units and is perfectly suitable for all high availability applications
The SMARPOD CLS-32 is a mid-size hexapod-like positioning system. This unit is equipped with SmarAct's Exchangeable Drive Units (EDUs) guaranteeing an easy and fast exchange of the piezo drive without the necessity to fully disassemble the positioning setup and without losing calibration and position data.
Like other SmarAct SMARPOD's, the SMARPOD CLS-32 is also available in a high vacuum and ultra-high vacuum version or made out of fully non-magnetic materials.
Travel [mm]20 (X); 20 (Y); 10 (Z)
Travel [21 (Θx); 24 (Θy); 38 (Θz)
Max. Normal Force [N]5
Max. Horizontal Force [N]2.5
Dimensions [mm]Ø 124
Height of Platform above Ground [mm]54
Sensor TypesS; SC
Smallest Increment [nm]1
Smallest Increment [µrad]1
Closed-Loop Repeatability [nm]< ± 200 (Full Travel Range); < ± 15 (1mm Linear Travel)
Closed-Loop Repeatability [µrad]< ±10
Vacuum OptionsHV (1E-6 mbar); UHV / UHVT (1E-11 mbar)
Non-Magnetic OptionYes (-NM)