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Linear stage SMARPOD CLS-32
piezoelectric3-axisvacuum-compatible

linear stage
linear stage
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Characteristics

Orientation
linear
Type
piezoelectric
Number of axes
3-axis
Other characteristics
vacuum-compatible, non-magnetic, closed-loop
Stroke

10 mm, 20 mm (0.394 in)

Description

SMARPOD CLS-32 The SMARPOD CLS-32 is equipped with Exchangeable Drive Units and is perfectly suitable for all high availability applications The SMARPOD CLS-32 is a mid-size hexapod-like positioning system. This unit is equipped with SmarAct's Exchangeable Drive Units (EDUs) guaranteeing an easy and fast exchange of the piezo drive without the necessity to fully disassemble the positioning setup and without losing calibration and position data. Like other SmarAct SMARPOD's, the SMARPOD CLS-32 is also available in a high vacuum and ultra-high vacuum version or made out of fully non-magnetic materials. Travel [mm]20 (X); 20 (Y); 10 (Z) Travel [21 (Θx); 24 (Θy); 38 (Θz) Max. Normal Force [N]5 Max. Horizontal Force [N]2.5 Dimensions [mm]Ø 124 Height of Platform above Ground [mm]54 Weight [g]550 Closed-Loop Sensor TypesS; SC Smallest Increment [nm]1 Smallest Increment [µrad]1 Closed-Loop Repeatability [nm]< ± 200 (Full Travel Range); < ± 15 (1mm Linear Travel) Closed-Loop Repeatability [µrad]< ±10 Options Vacuum OptionsHV (1E-6 mbar); UHV / UHVT (1E-11 mbar) Non-Magnetic OptionYes (-NM)

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.