Optical probe SP series

laboratoryelectrical characterization

Thanks to its fully closed-loop controlled motion system, the SMARPROBE enables positioning with unmatched repeatability and stability – even at the nanometer scale. This eliminates drift, manual correction and guesswork during probing, making complex measurements faster, more reliable, and highly automatable. That’s what closed-loop means – and that’s what makes the difference. The SMARPROBE SP4 offers 4 manipulators, while the SP6 expands this to 6, and the SP8 supports up to 8 manipulators. Each system includes one sample stage. All manipulators feature three degrees of freedom and are equipped with nanometer-resolution optical encoders for high-precision electrical probing. Smart positioning routines implemented in the dedicated control software, together with the ability to load up to four SEM sample stubs, maximize operating ease and throughput for any nanoprobing task. Built on SmarAct’s leading know-how in piezo-based nanopositioning, the robust mechanical design guarantees the highest stability and intuitive operation. All SMARPROBE systems are compatible with a wide range of FIBs, SEMs, and optical microscopes, making them an ideal solution both for retrofitting existing workflows and for integration into new instruments. The SMARPROBE probing systems support electrical characterization techniques ranging from 2-contact EBIC/EBAC to advanced 4- and 6-point probing measurements, making them an indispensable tool for semiconductor failure analysis labs. Key Benefits: Semi-blind operation in the SEM. Thanks to active position holding, low thermal drift and Point&Click functionality, probe positioning can be performed with minimal electron beam exposure,