High-vacuum valve XL seriesballelectrically-actuatedfor gas
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Characteristics
- Type
- ball
- Operation
- electrically-actuated
- Media
- for gas
- Body
- aluminum, anodized aluminum, light alloy
- Applications
- high-vacuum
- Number of channels
- 2-way
- Other characteristics
- corrosion-resistant, high-temperature, in-line, double-acting, single-acting, with seal, with bellows seal, electromagnetic
- Pressure
0 Pa
(0 psi)- Temperature
Max.: 150 °C
(302 °F)Min.: 5 °C
(41 °F)- Flow rate
Max.: 200 l/s
(52.83 us gal/s)Min.: 5 l/s
(1.32 us gal/s)
Description
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
VIDEO
Catalogs
Série XL
27 Pages
MGP series
36 Pages
Exhibitions
Meet this supplier at the following exhibition(s):
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.