Internal-mount rotary sputtering cathode MC-Series

internal-mount rotary sputtering cathode
internal-mount rotary sputtering cathode
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Characteristics

Mounting
internal-mount

Description

The MC is our mid-size internal-mount end block. It can handle targets up to 2500 mm and has a power rating of up to 100 kW DC or 80 kHz MFAC. SCI end blocks have high reliability and a simple, easy-to-maintain design. The single-ended configuration reduces the number of rotary and static seals, one of the most common failure modes in rotary cathodes. Our unique water fill and drain feature allows improved target cooling and full draining of the target water on blow down. The design eliminates the possibility of galvanic corrosion inside the end block, which could lead to water leaks and short circuits. Sputtering Components’ MC end blocks can be installed on any new coater or can easily replace planar systems. Features Patented power-delivery technology Unique target attachment method Durable, long-life rotary seals Industry standard mounting to lid Non-proprietary target design Patented target water fill abd drain Magnet bar can be set at any angle Benefits Highest reliability on the market Easy to install or retrofit from competitory endblocks Fastest target change available 1 hour annual maintenance; 3 hour total end block rebuild Lowest maintenance cost Use targets from any vendor High power with no inductive heating impact - no brush dust No galvanic corrosion

Catalogs

MC-Series
MC-Series
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