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gas delivery system

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gas delivery system gas delivery system - ODS


  • Applications:



The ODS series of High Concentration High Purity Ozone Gas Delivery Systems is designed for use in the most demanding
semiconductor applications. This highly reliable ODS is ideal for applications requiring high concentration ozone at a wide range of flow rates. The ODS system is a complete turnkey solution that is custom configured to plug and play with most semiconductor tools.

Its microprocessor based controller is designed to servo control the ozone delivered to the tool based on user provided setpoints.

The ODS system includes a multi-channel ozone leak detector and an exhausted enclosure where all the process gas lines
and fittings are double contained.