semiconductor gas sensor / NDIR
The OPTI-Sense series of sensors is based on Non-Dispersive Infrared (NDIR) technology. They are designed to precisely
measure the absorbance in the infrared spectrum of specialty gases typically found in semiconductor applications. They are
very compact and designed with no moving parts, making the OPTI-Sense robust and ideal for continuous in-situ gas monitoring of semiconductor processes.
Built-in diagnostics are included in the embedded software. All OPTI-Sense sensors are configured with analog and digital
interfaces, making them easy to integrate into any process.