inspection microscope / SEM / real-time / ultra-high resolution

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inspection microscope inspection microscope - MAIA3
  • Inspection microscope


  • Technical applications:


  • Type:


  • Other characteristics:

    real-time, ultra-high resolution


The MAIA3 is an ultra-high resolution SEM with excellent imaging capabilities in the whole range of beam energies.
A versatile detection system and high spatial resolution allows the observation of even the finest surface details. This is an essential feature for comprehensive characterisation of nanomaterials, for observation of beam-sensitive samples common in the semiconductor industry and for comfortable imaging of non-conductive samples including uncoated biological specimens.