inspection microscope / SEM / real-time / ultra-high resolution
real-time, ultra-high resolution
The MAIA3 is an ultra-high resolution SEM with excellent imaging capabilities in the whole range of beam energies.
A versatile detection system and high spatial resolution allows the observation of even the finest surface details. This is an essential feature for comprehensive characterisation of nanomaterials, for observation of beam-sensitive samples common in the semiconductor industry and for comfortable imaging of non-conductive samples including uncoated biological specimens.