6-tube special furnace up to 1600 °CHigh temperature tube furnace with 6 ceramic work tubes. The heated length of 2000 mm is splitted into 5 heating zones. MoSi2-heating elements are mounted freely hanging also between the tubes to optimize the temperature uniformity. To purge work tubes with protective gas like Argon, Nitrogen or Hydrogen, each work tube is equiped with gas-tight, water cooled flanges.