Micro-pattern imprinting machine ST50 has the features of high-precision control of the press position and press force. It is a high-precision transcriber that can imprint fine-shaped various elements on the micrometer to nanometer order, which are important in the IT, electronics, biotechnology, life science, environment, and energy sectors.
Features
The high resolution XY stage that supports step and repeat (S&R) imprinting can be equipped. (Option)
The vacuum chamber that supports imprinting in vacuum can be equipped. (Option)
The XYΘ stage and alignment camera for high-precision alignment of the mold and substrate can be equipped. (Option)
The high-performance man-machine interface is equipped.
UV imprinting or thermal imprinting is applicable.