Infrared Gold Image Furnace / RTA System
This system is a Mini Lamp Annealer that enables the heat treatment up to 50mm square size samples.MILA-5000 series, the current models which are available for up to 20mm square size samples, have been velued by many customers since their release. But in response to increased number of demands from customers that they want to heat bigger samples, this new system, available for heat treatment of up to 50mm square size samples has been developed with still having a compact body in which heating furnace, chamber and temperature controller are all integrated.
SPECIAL FEATURES / FURTHER APPLICATIONS
APPLICATIONS
Rapid thermal annealing of Si wafer and compound wafer
Rapid thermal annealing of electronics material like substrates of optical CVD
Heat treatment of glass substrates, ceramics and compound materials etc
Thermal cycle test
Thermal annealing of metal materials
Heat resistance evaluation of coating films
Heating and drying of organic materials and resins
FEATURES
Heat treatment up to the maximum 50 mm square size samples
Maximum operating temperature 1200°C
Desktop type in which heating furnace, chamber and temperature controller are all integrate
Rapid heating/cooling and clean heaing with cold wall structures
Simple input of temperature recipe into computer connected with USB
Display temperature data on the PC monitor during heating (The data can be saved in the text format.)