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MOCVD deposition machine / thin-film
TurboDisc E475

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MOCVD deposition machine / thin-film MOCVD deposition machine / thin-film - TurboDisc E475
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Characteristics

  • Method:

    MOCVD

  • Deposition type:

    thin-film

Description

The TurboDisc E475 is a MOCVD deposition machine from Veeco that provides high volume production of premium devices. It produces HB-LEDs, laser diodes, pHEMTs, HBTs, and III-V concentrator solar cells in a high capacity and improved cost of ownership. It also optmizes the quality, productivity and the yield.

The machine is integrated with a vacuum load-lock automation that enables long production cycles and productivity. It is also installed with the RealTemp® 200 system which gives the operator a direct, automated closed-loop wafer temperature control. The machine also has the FlowFlange® that brings discrete injection zones with individual flow matching to provide a constant quality and repetability.