MOCVD deposition machine / thin-film
The TurboDisc E475 is a MOCVD deposition machine from Veeco that provides high volume production of premium devices. It produces HB-LEDs, laser diodes, pHEMTs, HBTs, and III-V concentrator solar cells in a high capacity and improved cost of ownership. It also optmizes the quality, productivity and the yield.
The machine is integrated with a vacuum load-lock automation that enables long production cycles and productivity. It is also installed with the RealTemp® 200 system which gives the operator a direct, automated closed-loop wafer temperature control. The machine also has the FlowFlange® that brings discrete injection zones with individual flow matching to provide a constant quality and repetability.