Vacuum pressure sensor WUD-2 series

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Semiconductor, flat panel display and photovoltaic industry Ultrapure gas supply in semiconductor production systems Special features High-accuracy pressure measurement 0.15 % RSS Excellent long-term stability Signal noise cancellation and shielding Vacuum-referenced pressure measurement Active temperature compensation Description Reliable The WUD-2x series ultra high purity transducers combine state-of-the-art transducer concepts with analogue output signals. Thus the safest and most accurate pressure measurements necessary for today’s market requirements are provided. Pressure measurement, based on a true vacuum reference, and electronic measures for interference shielding and signal noise cancellation ensure high-accuracy pressure measurement and excellent long-term stability. Active temperature compensation reduces the impact of changing temperatures on the transducer, allowing safe operations even in applications with high fluctuations in temperature, e.g. Joule-Thomson effect in the case of gas expansion. WUD-25 (flow through) and WUD-26 (surface mount)transducers are specifically designed to sustain torsionapplied stresses often incurred during installation. The special design of the thin-film sensor eliminates the risk of sensor failure due to loads at the process connection or welded joints. Versatile The WUD-2x can be readily installed in “on-tool” gas distribution systems. The bright LED display is rotatable and easy to read from any position. Application-specific monitoring and control operations can be realised via two programmable switch outputs.