multi-axis positioning system / 6-axis / 3-axis / 1/2-axis
ZMI™ Series

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multi-axis positioning system / 6-axis / 3-axis / 1/2-axis multi-axis positioning system / 6-axis / 3-axis / 1/2-axis - ZMI™ Series
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Characteristics

  • Number of axes:

    multi-axis, 6-axis, 3-axis, 1/2-axis, YZ, 2/3-axis, 4-axis, 5-axis, single-axis, 2-axis, XY, XZ

  • Features:

    linear, laser, optical

  • Applications:

    industrial, for the semiconductor industry, for wafer inspection and metrology, vacuum

  • Other characteristics:

    displacement measuring interferometer

Description

ZMI!" Series - Displacement Measuring Interferometers
ZMI!" components can be assembled in a wide variety of configurations. The example systems below show some typical configurations used by ZMI!" customers.

2-Axis System
2-Axis System (Vacuum)
3-Axis System
Flat Panel Application