Production Ready 3D Optical Profiler System
The ZeGage™ Pro and ZeGage™ Pro HR 3D optical profilers provide non-contact measurement and characterization of micro- and nano-scale features of many types of surfaces, ensuring quality control and process monitoring in your manufacturing environment.
Our industry-leading ZeGage Pro-series sets the standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers. Built on ZYGO’s proprietary CSI technology, the ZeGage Pro delivers innovative technologies to enable precise, reliable, simple, and confident surface metrology.
Exclusive capabilities include SureScan™ technology for vibration robust metrology, Part Finder, and Smart Setup for simplified part setup and optimized measurements. It’s never been simpler to measure a wide variety of surfaces and parts, quickly and easily.
• Proprietary non-contact measurement technology is enhanced with SureScan™ technology for low sensitivity to vibration and easy placement anywhere within your facility.
• Quantitative surface metrology with nanometer-level precision provides superior gage capability.
• High resolution 1.9 million pixel image sensor provides fast areal measurements in seconds, for excellent surface detail and visualization.
• Fully-automated measurement sequences and field stitching enable high resolution inspection of large areas. (Requires optional motorized part stage.)