optical profilometer / 3D / white light interferometry / interferometry
ZeGage™ Pro

Add to MyDirectIndustry favorites
Compare this product Don’t compare this product
optical profilometer optical profilometer - ZeGage™ Pro


  • Technology:

    optical, 3D, white light interferometry, interferometry

  • Function:

    roughness, flatness

  • Applications:

    industrial, for production lines, laboratory

  • Configuration:


  • Other characteristics:

    non-contact, non-destructive


ZeGage™ Pro
3D Optical Surface Profiler with Sub-Nanometer Precision

The ZeGage Pro optical profiler expands on the capabilities of the ZeGage profiler with higher precision, faster measurement speed, and an increased range of measurable surfaces – while preserving its ease of use, vibration insensitivity, and small footprint.

The ZeGage Pro profiler can measure a wider variety of surfaces – ranging from very rough to super smooth, with sub-nanometer precision, independent of field of view. Surface finishes may include ground, honed, lapped, polished, and super-polished on materials such as glass, ceramic, and metal.

For high-speed form measurements, the ZeGage Pro scans up to twice as fast as the ZeGage, providing faster time-to-data and increased throughput for production metrology.

As with the ZeGage profiler, the interactive control software, Mx™, provides easy and detailed visualization to help you control your process. Read more to see how the power, versatility, and value of the ZeGage Plus profiler can benefit you.

Key Features:

• Proprietary non-contact measurement technology has low sensitivity to vibration, eliminating the need for vibration isolation platforms in most applications.
• More than 20X better surface topography repeatability over standard ZeGage.
• Up to 2X faster vertical scan rate over standard ZeGage.
• Measures virtually all surfaces from rough to super-smooth.
• Vibration-resistant, for production floor metrology and process control.
• Correlates to 2D and 3D standards, and complies with ISO 25178 surface roughness parameters.
• Quantitative surface metrology with sub-nanometer precision provides superior gage capability.