Optical profilometer ZeGage™ Pro
3Dwhite light interferometryinterferometry

optical profilometer
optical profilometer
optical profilometer
optical profilometer
optical profilometer
optical profilometer
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optical, 3D, white light interferometry, interferometry
roughness, flatness
industrial, for production lines, laboratory
Other characteristics
non-contact, non-destructive


ZeGage™ Pro Production Ready 3D Optical Profiler System The ZeGage™ Pro and ZeGage™ Pro HR 3D optical profilers provide non-contact measurement and characterization of micro- and nano-scale features of many types of surfaces, ensuring quality control and process monitoring in your manufacturing environment. Our industry-leading ZeGage Pro-series sets the standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers. Built on ZYGO’s proprietary CSI technology, the ZeGage Pro delivers innovative technologies to enable precise, reliable, simple, and confident surface metrology. Exclusive capabilities include SureScan™ technology for vibration robust metrology, Part Finder, and Smart Setup for simplified part setup and optimized measurements. It’s never been simpler to measure a wide variety of surfaces and parts, quickly and easily. Powerful Performance • Proprietary non-contact measurement technology is enhanced with SureScan™ technology for low sensitivity to vibration and easy placement anywhere within your facility. • Quantitative surface metrology with nanometer-level precision provides superior gage capability. • High resolution 1.9 million pixel image sensor provides fast areal measurements in seconds, for excellent surface detail and visualization. • Fully-automated measurement sequences and field stitching enable high resolution inspection of large areas. (Requires optional motorized part stage.)



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