Brooks instruments gas flow meters

Mass flow rate: 10 g/h - 27,000 g/h
Process temperature: 0 °C - 65 °C
Process pressure: 10 psi - 200 psi

Quantim® Series Coriolis Mass Flow Controllers & Meters The industry standard for low-flow Coriolis measurement and control. Achieve superior accuracy and unmatched zero stability in ...

Process temperature: 5 °C - 50 °C
Process pressure: 0 bar - 10 bar
Precision: 0.35, 1 %

... Thermal Mass Flow Controllers & Meters One device. Multiple gases and flows. Maximum flexibility. Multiple gases in one device equals maximum process flexibility and productivity. ...

Volumetric flow rate: 0 l/min - 300 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 34.47 bar

... controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard ...

Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 10.34 bar
Precision: 0.35, 1 %

... levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow ...

Volumetric flow rate: 0 l/min - 1,000 l/min
Process temperature: 0 °C - 65 °C
Process pressure: 0 psi - 1,500 psi

... require. Features • Fast flow response to command changes with negligible overshoot/undershoot • Removable flow sensor • Insensitive to mounting attitude • Mechanically and electrically compatible ...

Volumetric flow rate: 0 l/min - 36,000 l/min
Process temperature: -14 °C - 65 °C
Process pressure: 310, 100, 70 bar

... mass flow control. Hardened for the harshest environments. Now available with EtherNet/IP™ Whether it’s dust, moisture, temperature extremes or wash-down requirements, the SLAMf Series elastomer sealed thermal mass ...

Volumetric flow rate: 40 l/min
Process temperature: 5 °C - 50 °C
Process pressure: 0 bar - 10 bar

... response for time-critical flow processes. The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key ...

Volumetric flow rate: 0 l/min - 50 l/min
Process temperature: 0 °C - 65 °C
Process pressure: 0 psi - 150 psi

Cost-effective gas flow metering for targeted applications. When you need a compact, economical mass flow meter that delivers long-term, stable flow ...

Volumetric flow rate: 0 l/min - 300 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 7 psi - 90 psi

GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters Raises the standard in performance for value-driven metal sealed applications. For many industrial and semiconductor processes, both ...

Volumetric flow rate: 0 l/min - 30,000 l/min
Process temperature: 0 °C - 65 °C
Process pressure: 0 psi - 1,500 psi

... electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas ...