Brooks instruments RS485 flow meters

1 company | 7 products
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mass flow meter
mass flow meter
Quantim® QMC series

Mass flow rate: 10 g/h - 27,000 g/h
Process temperature: 0 °C - 65 °C
Process pressure: 10 psi - 200 psi

Quantim® Series Coriolis Mass Flow Controllers & Meters The industry standard for low-flow Coriolis measurement and control. Achieve superior accuracy and unmatched zero stability in ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
GF40

Process temperature: 5 °C - 50 °C
Process pressure: 0 bar - 10 bar
Precision: 0.35, 1 %

... Thermal Mass Flow Controllers & Meters One device. Multiple gases and flows. Maximum flexibility. Multiple gases in one device equals maximum process flexibility and productivity. ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
GF1 series

Volumetric flow rate: 0 l/min - 300 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 34.47 bar

... controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
GF 125

Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 10.34 bar
Precision: 0.35, 1 %

... levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
SLAMf series

Volumetric flow rate: 0 l/min - 36,000 l/min
Process temperature: -14 °C - 65 °C
Process pressure: 310, 100, 70 bar

... mass flow control. Hardened for the harshest environments. Now available with EtherNet/IP™ Whether it’s dust, moisture, temperature extremes or wash-down requirements, the SLAMf Series elastomer sealed thermal mass ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
GF80

Volumetric flow rate: 0 l/min - 300 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 7 psi - 90 psi

GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters Raises the standard in performance for value-driven metal sealed applications. For many industrial and semiconductor processes, both ...

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Brooks Instrument
thermal mass flow meter
thermal mass flow meter
9861

Process temperature: 0 °C - 150 °C
Process pressure: 0 psi - 90 psi
Precision: 1, 0.35 %

... temperature flow control accuracy and efficiency. Engineered for the challenging conditions associated with high temperature delivery of condensable precursors and dopants, the 9861 Series high temperature ...

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Brooks Instrument
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