HORIBA STEC flow regulators

Pressure: 3, 4 bar

The GR-511F can control gases used to cool the back side of wafers that are fixed in position by an electrostatic chuck system. The stability and accuracy of the GR-511F makes it ideal for controlling the flow ...

Multi Range/Multi Gas Digital Mass Flow Controller This is HORIBA's best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change ...

The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 ...

Flow rate: 3 l/min - 150 l/min
Pressure: 1 bar - 3 bar

... digital mass flow controller with a fairly high accuracy. This controller features an accuracy of ±1.0% S.P and can be operated in high temperatures. It is a clean gas supply unit that can be used ...

Pressure: 0 bar - 2 bar

The SEC-400 series mass flow controller is used in a wide variety of industries and markets all over the world. It is installed with thermal valves and offers reliable control capabilities. High ...

Flow rate: 0 l/min - 0 l/min
Pressure: 1 bar - 3 bar

... chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700X Series demonstrates ...

Flow rate: 0 us gal/min - 100 us gal/min
Pressure: 1 bar - 3 bar

... micro-litre to ultra low flow rate control Enable precision flow control of low boiling point and high viscosity liquids Ultra clean. Measurement Techniques Cooling ...

Flow rate: 0 l/min - 2 l/min

Solenoid valves of the SEC-E series are used for the measurement and control of fluid mass flow rates, and are compatible with non corrosive gases. These normally closed solenoid valves are mainly used ...