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The µXS and XXS models are ther newest and smallest actuators manufactured by CEDRAT TECHNOLOGIES and produce displacements up to 150µm.
The APA 30µXS:
is presently the smallest Amplified Piezo Actuator. With a mass of only 0.15gr, it can be considered as a micro piezo actuator.
Stroke (µm): 30; Blocked force (N): 3.3; Resonance frequency (Hz): 4770; Dimensions (mm): 3.9*8.6*5.0
The APA 150XXS:
is an extra thin version of the Amplified Piezo Actuator XS series.
Stroke (µm): 120; Blocked force (N): 3; Resonance frequency (Hz): 1045; Dimensions (mm): 4.5*13.1*9.0
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The XS models of APA™ developed by CEDRAT TECHNOLOGIES produce displacements up to 80 µm.
The APA 35XS is the middle stroke and middle force version of the Amplified Piezo Actuator XS series.
Stroke (µm): 55; Blocked force (N): 27; Resonance frequency (Hz): 3883; Dimensions (mm): 5,5*13,3*9
The APA 50XS is a highest stroke and lowest force version of the Amplified Piezo Actuator XS series.
Stroke (µm): 80; Blocked force (N): 18; Resonance frequency (Hz): 2700; Dimensions (mm): 4,7*12,8*9.0
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The M series are medium sized actuators which are about 20 mm-high, weigh about 20g.They produce max displacements between 100 µm and 200 µm.
CEDRAT TECHNOLOGIES enlarges the M Series by pushing the limits of the stroke up to 800 µm with the APA 900M.
- The APA 100M
is the smallest stroke and highest force version of the Amplified Piezo Actuator M series.
Stroke (µm): 110; Blocked force (N): 184; Resonance frequency (Hz): 1900; Dimensions (mm): 25*55,1*9
- The APA 150M
is the middle stroke and middle force version of the Amplified Piezo Actuator M series.
Stroke (µm): 169; Blocked force (N): 100; Resonance frequency (Hz): 1300; Dimensions (mm): 22*55,1*9
- The APA 200M
is the highest stroke and lowest force version of the Amplified Piezo Actuator M series.
Stroke (µm): 230; Blocked force (N): 73; Resonance frequency (Hz): 900; Dimensions (mm): 17*55*9
- The APA 400M
is a model derived from M series with a larger stroke.
Stroke (µm): 400; Blocked force (N): 38; Resonance frequency (Hz): 495; Dimensions (mm): 13*48,4*11,5
- The APA 900M
is a model derived from M series with the largest stroke. The APA900M is only dedicated to static working condition.
Stroke (µm): 800; Blocked force (N): 16; Resonance frequency (Hz): 248; Dimensions (mm): 10*49*11,5
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The MML Series are actuators manufactured by CEDRAT TECHNOLOGIES and are especially design to obtain medium stiff actuators and produce much higher displacements than DPA. They have a high bandwidth and can be used in several dynamic applications.
- The APA 100MML.
is a model derived from M & ML with a lower stroke than the APA400MML.
Stroke (µm): 100; Blocked force (N): 855; Resonance frequency (Hz): 1730; Dimensions (mm): 58*78*11.5
- The APA400MML
Stroke (µm): 364; Blocked force (N): 189; Resonance frequency (Hz): 634; Dimensions (mm): 20*78*11,5
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The S series are small Actuators manufactured by CEDRAT TECHNOLOGIES and produce displacements between 60 µm and 120µm.
The APA 60S is the smallest stroke and highest force version of the Amplified Piezo Actuator S series.
Stroke (µm): 80; Blocked force (N): 102; Resonance frequency (Hz): 2860; Dimensions (mm): 15*29,2*9.0
The APA 120S is the highest stroke and lowest force version of the Amplified Piezo Actuator S series.
Stroke (µm): 140; Blocked force (N): 39; Resonance frequency (Hz): 1300; Dimensions (mm): 13*28,7*9.0
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The SM Series are small Actuators manufactured by CEDRAT TECHNOLOGIES. They are especially design to obtain stiff actuators and produce higher displacements than DPA (Direct Piezo Actuators). They have a high bandwidth and can be used in several dynamic applications.
The APA 40SM is the smallest stroke and highest force version of the Amplified Piezo Actuator SM series.
Stroke (µm): 52; Blocked force (N): 194; Resonance frequency (Hz): 4100; Dimensions (mm): 15*27,2*11,5
The APA 60SM is the highest stroke and lowest force version of the Amplified Piezo Actuator SM series.
Stroke (µm): 80; Blocked force (N): 110; Resonance frequency (Hz): 2800; Dimensions (mm): 13*26,9*11,5
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The L series are large actuators manufactured by CEDRAT TECHNOLOGIES and produce displacements up to 1mm.
- The APA 230L
is the smallest stroke and highest force version of the Amplified Piezo Actuator L series.
Stroke (µm): 236; Blocked force (N): 1350; Resonance frequency (Hz): 850; Dimensions (mm): 85*145,3*16
- The APA 500L
is the middle stroke and force version of the Amplified Piezo Actuator L series.
Stroke(µm): 500; Blocked force(N): 570; Resonance frequency(Hz): 460; Dimensions(mm): 55*145*16
- The APA 1000L
is the highest stroke version of the Amplified Piezo Actuator L series.
Stroke(µm): 950; Blocked force(N): 373; Resonance frequency(Hz): 290; Dimensions(mm): 35*145*16
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The XL models are the largest standard piezo actuators manufactured by CEDRAT TECHNOLOGIES. They offer up to 1mm stroke, either under static or dynamic conditions.Other models can be defined upon request.
- The APA 500XL
is the smallest stroke and the highest force version of the APATM XL Series.
Stroke(µm): 500; Blocked force(N):1100; Resonance frequency(Hz): 1280; Dimensions(mm): 82*214,3*21
- The APA 1000XL
is the biggest Amplified Piezo Actuator produced by CEDRAT TECHNOLOGIES
Stroke(µm): 1050; Blocked force(N): 745; Resonance frequency(Hz): 980; Dimensions(mm): 57*214,3*21
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The ML Series models are actuators manufactured by CEDRAT TECHNOLOGIES and are especially designed to obtain very stiff actuators. They produce higher displacements than DPA, they have a very large bandwidth and can be used in several dynamic applications.
- The APA 95ML
is the smallest stroke and highest force version of the Amplified Piezo Actuator ML series.
Stroke (µm): 94; Blocked force (N): 1900; Resonance frequency (Hz): 2000; Dimensions (mm): 60*80,1*22,5
- The APA 120ML
is the highest stroke and lowest force version of the Amplified Piezo Actuator ML series.
Stroke (µm): 130; Blocked force (N): 1400; Resonance frequency (Hz): 1750; Dimensions (mm): 45*78,9*22,5
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DSM’s FlexFrame PiezoActuator(TM) series is a family of mechanically amplified, flexure-guided piezo actuators for precision motion control and positioning applications. The actuators feature solid-state flexure hinges to eliminate backlash and stiction.
Standard piezo actuator designs offer displacement capabilities ranging from a few microns up to 2 mm, and the actuators typically feature low voltage (150-200V) piezo material. Custom designs can be produced for unique displacement ranges, design stiffness, and environmental considerations (temperature, vacuum, non-magnetic, etc.), DSM's piezoelectric actuators can also be configured with integrated displacement feedback sensors for closed-loop micropositioning and nanopositioning.
DSM's FlexFrame PiezoActuator(TM) design allows for high displacement performance in an extremely low profile package. Custom mounting conditions can be integrated into the design.
DSM welcomes custom requests for flexure-guided piezo actuator designs. Please consider the following questions and contact us:
* What displacement range is required?
* What load will the actuator carry? Is it a static load or a dynamic load such as a spring force?
* What positioning resolution and accuracy are required?
* How fast does the actuator need to move, or at what frequency will you drive the actuator?
* What does the desired motion profile look like? (point-to-point, sinusoidal, etc.)
* Are you able to use open loop operation, or do you require closed-loop servo control?
* Are there any special environmental considerations (temperature, humidity, vacuum, etc.)?
* What are the geometric constraints for the actuator or stage?
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RC3 motors are high precision ceramic motors. Designed and manufactured by Nanomotion, Ltd., these motors combine unlimited stroke with high resolution, all in a compact package. RC3 motors provide a linear response to the input voltage. The operation of the motor and driver resembles that of a DC-motor driven by a voltage amplifier. The RC3-HV and RC3-UHV motors are constructed of materials that have been selected and designed for high vacuum compatibility.
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- Piezo Stack Actuator
- High Load Capacity to 100 kN
- High Force Generation to 80 kN
- Large Cross Sections to 56 mm Diameter
- Variety of Shapes
- Extreme Reliability >109 Cycles
- Proven and Flexible Design
- Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time
- Vacuum-Compatible Versions
PICA™-Stack piezo ceramic linear actuators are offered in a large variety of standard shapes and sizes with additional custom designs to suit any application.
Ultra-High Reliability, High Displacement, Low Power Requirements
PICA™-Stack actuators are specifically designed for high-duty-cycle applications. With our extensive applications knowledge, gained over several decades, we know how to build performance that does not come at the price of reliability. All materials used are specifically matched for robustness and lifetime. Endurance tests on PICA™ actuators prove consistent performance, even after billions (1,000,000,000) of cycles. The combination of high displacement and low electrical capacitance provides for excellent dynamic behavior with reduced driving power requirements.
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The P-653 OEM miniature piezo-motor linear slide was designed for OEM applications where small optics or micromechanical parts have to be moved or aligned quickly and precisely. It comes pre assembled on a PCB driver board.
The P-653 linear actuator outclasses conventional linear slides with its very high velocity of 200 mm/sec.
Features
* Long Travel Range for its small size 2 mm (only 8 mm long)
* True Linear Motor Driven Linear Slide, with out the Rotary Conversion Losses
* High Speed: up to 200 mm/sed
* Cost-Effective Drive for High Volume OEM Applications
* Comes Pre-Assembled and Mounted on a PCB Driver Board
* Self Locking Position Hold at Rest with no current required.
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- Award-Winning Technology
- Low Operating Voltage
- Superior Lifetime Even Under Extreme Conditions
- Very Large Operating-Temperature Range
- High Humidity Resistance
- Excellent Temperature Stability
- High Stiffness
- UHV Compatible to 10-9 hPa
- Sub-Millisecond Response & Sub-Nanometer Resolution
Increased Lifetime and Higher Performance
PICMA® (PI Ceramic Monolithic Actuator) piezo actuators are characterized by their high performance and reliability, even in extremely harsh environments. They are superior to conventional multilayer actuators in industrial applications and high-endurance situations, where they show substantially longer lifetimes both in static and dynamic operation.
New Production Process, Optimized PZT Ceramics
PICMA® piezo actuators are made from a ceramic material in which the piezoceramic properties such as stiffness, capacitance, displacement, temperature stability and lifetime are optimally combined. The actuators" monolithic design and special electrode structure was made possible by advances in production technology. This development is just one reflection of the more than 30 years experience PI has with thousands of industrial PZT applications.
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Piezo Linear Actuator Solutions:
PI offers the largest selection of research and industrial-reliability Piezo Actuators and Piezo Translators (linear actuators) worldwide. In addition to the hundreds of models presented in this catalog, we manufacture custom designs tailored to customers’ requirements. PI is highly vertically integrated, controlling each manufacturing step from PZT raw materials to finished systems.
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Amplified Piezoelectric Actuators (APA)
Patented by the CEDRAT Group, the amplified piezo actuator is a mechanical magnified preloaded stack of low voltage piezoelectric ceramics (MLA). The mechanical amplification is obtained thanks to an external elliptical shell made of stainless steel which magnify along the short axis the MLA deformation occurring along the main axis. This elliptical frame also protects the MLA against tensile force. It provides the user with mechanical interfaces for easy integration. This prestressing and magnifying flextensionnal frame applies an optimal preloading force to the MLA which ensures a longer life time and better performance than traditional mechanical amplifier based on lever arm and flexure pivot, when applied dynamically.
The Amplified Piezo Actuators, APAs, developed by the CEDRAT Group have force and displacement performance ranges which are beyond that of direct or bimorph Piezoactuators.
10 series (uXS, XXS, XS, S, SM, M, MML, ML, L, XL) of APAs are available in order to meet the different needs in terms of stroke, force and dimensions
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DSM's NA-25 and NA-80 actuators are direct-drive piezoelectric actuators integrated into a protective metallic frame. The frame is a monolithic piece of stainless steel or titanium alloy with a flexure-based expansion component.
The flexure minimizes the resistance that the frame might impart to the piezoelectric actuation. The frame also includes standard threaded receiver holes at the top and bottom and incorporates a preload mechanism. The mechanical preload maintains compression on the piezoelectric ceramic under high tensile forces and ensures bidirectional operation. The design thus provides increased resilience to mechanical loads when compared to non-preloaded actuators.
The NA-25 and NA 80 are well-suited to many applications where high force and high frequency response are required.
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DSM's LPA FlexFrame PiezoActuator™ products are flexure-guided lever mechanisms that mechanically amplify the motion of the integrated piezoelectric ceramic. DSM's LPA designs span a range of displacement capabilities up to 1mm.
The actuator frame is typically a monolithic piece of stainless steel or titanium alloy, and it can include threaded or through holes for attachment at the actuator's output. For mounting purposes, the frame can be designed with threaded holes in the bottom or side structure.
The moving mass in a LPA actuator is typically less than that of other types of mechanically amplified mechanisms. Consequently, the LPA architecture can enable relatively higher dynamic response performance.
The LFPA FlexFrame PiezoActuator™ products include a secondary mechanical amplification to attain relatively larger motion ranges up to 10mm. In order to satisfy a non-magnetic requirement for use in magnetic resonance imaging (MRI) applications, DSM has fabricated LFPA mechanisms from titanium alloy.
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Piezoceramic Actuators of the PZ Series
The Matrix selection boxes of the PZ Series use an exclusive low absorbtion piezoceramic technology and are equipped with a smart electronic microprocessor of new concept.
Characterized by high actuation speed and technologic solutions of absolute supremacy, they create a new referring standard both for quality and performance.
The data transmission, from the controller to the selection boxes and vice versa, takes place on RS-422 high speed balanced lines granting the highest reliability and the monitoring in real time of the system's correct fonctionning.
A LED positioned on every selection box grants the visual control of the correct wiring during the loading and the set up of parameters into the machine.
The programming of the addresses on the selection boxes takes place automatically, it is carried out by the controller; a further exclusive electronical, tangential and adjusting system allows the nearest precision of selection, equal to ± 1/10 of needle on both the selection ways (loop/bushing).
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Equipment using the piezoelectric effect of PZT based ceramic elements can achieve unlimited high resolution positioning. piezosystem jena is one of the world leading companies in this technology. An electric field is applied to the ceramic by controlling analog voltage signals.
This results in a change in length of the bi-polar elements depending on the signal strength. piezosystem jena makes use of this effect for the design of positioning equipment with nearly unlimited high resolution. The increased in the length of the PZT is quite small.
Therefore piezosystem jena employs sophisticated flexure hinge designs in order to enlarge the motion up to the mm range. The unique nano-positioning elements of piezosystem jena guarantee the highest resolution in the sub-nm range even when the total travel range is in mm.
applications:
Valves
Laser collimators
Micro- und nanopositionig
Laserscanning
Mirror shifting
Fiberalignment
Metrology
Microlens positioning
Screening
Microinjection, Patch Clamp
Wafer adjustment
Semiconductor
Beamssteering
AFM, SNOM, RAMAN
Material Sciences
Lasercoupling
Detection
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Stepping Piezoelectric Actuators (SPA) are new long-stroke linear piezoelectric motors for micro/nano positioning applications benefiting of the APA heritage. They operate by accumulation of small steps.
Between each step the actuator is locked in position. When the long stroke is performed, it can be also operated in a deformation mode for a fine adjustment. In this case, the stroke is proportional to the applied voltage, which leads to a nanometer resolution and a high bandwidth. This actuator can be supplied with CEDRAT TECHNOLOGIES standard Linear Amplifiers.
In summary, SPAs offer:
A blocking at rest in any position (locking without power supply),
high stiffness,
A nano positioning resolution all along the stroke
Non magnetic behavior
Stepping Piezoelectric Actuators (SPA) find applications as micro/nano positioning, locking mechanism, valves actuators. They can be used in instrumentation, especially microscopes (AFM, STM), non-magnetic
equipment (MRI), space telescopes. Multi-axis OEM devices can be developed. SPA is a complement to the Amplified Piezoelectric Actuators (APAs) from CEDRAT TECHNOLOGIES.
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Simple electronics
For users wishing to fully integrate drivers into the overall system PiezoMotor can supply all waveforms and movement patterns to speed up the implementation. The motor is operating in a non-resonant mode and is not sensitive to cable lengths etc.
Open Loop/Closed Loop Operation
The motor can be moved in full steps, shorter steps or partial steps (micro-stepping) giving positioning resolution in the nanometer range. For extreme positioning requirements in the subnanometer range a bending mode is possible. Speed is easily adjustable from extremely low up to max specified.
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The Piezo LEGS® 20N linear motor is is ideally suited for move and hold applications or for automatic adjustments. is due to the fact that the motor does not require any power in hold position as well as that the motor has no back-lash and can move in increments of single nanometers.
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The Piezo LEGS® 10N linear motor is intended for a very large range of applications. The motoris ideally suited for move and hold applications or for automatic adjustments. This is due to the fact that the motor does not require any power in hold position as well as that the motor has no back-lash and can move in increments of singlnanometers. The Piezo LEGS® linear motor is available in a number of different verexample vacuum and non-magnetic environments (see separate data sheets). The maximum force of the motor is set by adjusting the number of springs giving the normal force. The motor is normally set for 6.5N (standard)
10N (optional) which is the maximum force. The motor is easily integrated and the drive rcan also be equipped with a metal drive raadapter (optional) to further facilitate the
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Simple electronics
For users wishing to fully integrate drivers into the overall system PiezoMotor can supply all waveforms and movement patterns to speed up the implementation. The motor is operating in a non-resonant mode and is not sensitive to cable lengths etc.
Open Loop/Closed Loop Operation
The motor can be moved in full steps, shorter steps or partial steps (micro-stepping) giving positioning resolution in the nanometer range. For extreme positioning requirements in the subnanometer range a bending mode is possible. Speed is easily adjustable from extremely low up to max specified.
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Nanomotion's EDGE motor is the smallest industrial motor of its kind available in the marketplace today. Providing unlimited linear or rotary motion, the EDGE motor offers extensive opportunities in applications that suit a wide range of industries. The EDGE motor works with a uniquely designed, compact ASIC-based driver, and can be operated with any servo controller. The EDGE motor can be easily integrated into most bearing structures, and is ideal for mass production opportunities.
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The PiezoWave™ motor consists of very small piezo ceramic elements that are surface assembled on a flexible printed circuit board. The design enables us to manufacture the motors in mass volume manufacturing equipment at very low cost.
The small size is the most apparent advantage of PiezoWave™, a motor that has been developed for very demanding applications in mobile phones, resulting in many other important properties such as robustness, motion dynamics (speed, precision etc.), power efficiency, weight etc.
The simple design of the PiezoWave™ and the fact that it is a complete motor also makes it very easy to integrate into other products.
150 mm/s at 0 load
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A walking drive principle
Imagine an electric motor of approximately the same size as an ant, but 1,000 times as strong. Then imagine that it moves like an ant, despite being constructed in one solid piece. Still, it can actually walk, step by step, one pair of legs at a time.
What is really unique with the Piezo LEGS® motor is its ability to synchronize the movement of each pair of legs - just like an ant. What is obvious in nature is not necessarily as obvious to an electric motor.
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Nanomotion's HR Series motors are high precision ceramic motors which range in a size from a single element (providing 4N of force) to an eight piezo motor (providing 32N of force). The HR Series is capable of driving both linear stages and rotary stages. The HR Series piezo motors have a wide dynamic range of speed, from several microns per second to 250mm/sec and can easily mount to traditional low friction stages or other devices. The unique operating characteristics of the HR Series motors provide inherent braking and the ability to eliminate servo dither when in a static position.
HR Ultrasonic Motor Series Manuals
HR1 - piezo ultrasonic motor
HR4 - piezo ultrasonic motor
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The utilized walking principle gives the new rotating motor unique properties, like low and variable speed - from 20 rpm down to one revolution a week - without gear box - and a maximum torque of 80 Nmm. The resolution is less than one µ-radian or close to one ten milionth of a turn. Totally back-lash free.
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Piezoelectric motors, Piezoelectric actuators
