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Zaber's T-RS Series of precision motorized rotary stages are stepper motor driven, worm gear rotary stages capable of a full 360° rotation. Each rotary stage has an integrated microstepping stepper motor controller, offering high resolution daisy-chainable operation.
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Linear Motor Table LT is a direct drive positioning table featuring a low sectional height and light weight. An AC linear servo motor and an optical linear scale are compactly integrated in the moving table and bed made of aluminum alloy, and miniature type linear motion rolling guides IKO Linear Way L are assembled in the table guide section. Linear Motor Table LT, adopting a C-shaped magnet yoke arranged in-between two stator magnets together with a moving coil, provides large driving force and achieves high speed and quick response positioning. Linear Motor Table LT is most suitable for applications requiring high speed operation such as semi-conductor and liquid crystal related equipment, measuring instruments, assembling systems, material transfer equipment.
Features:
Maximum thrust 900N for high thrust series
Compactness and high thrust were pursued by adopting miniature optical linear scale and C-shaped magnet yoke. Maximum thrust 900N is achieved by high-density coil arrangement. Also, compact series output 450N with the total height only 40mm
High acceleration and high response with a smooth motion
High acceleration and high response positioning can be made due to super light weight moving table and high thrust. The table can travel with a smooth motion by using C-shaped magnet yoke which cancels out magnet forces and eliminates the unnecessary load on the linear motion rolling guides. Also, C-Sleeve Linear Way, long term maintenance free type, is adopted for their linear motion rolling guides.
High resting stability and speed stability
High resting stability is achieved by the latest servo technology. This linear motor can be used as a high accurate positioning device. Also, high speed stability is achieved.
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Aerotech manufactures a large selection of linear tables/slides/stages that utilize our own brushless linear direct-drive servomotors, as well as ball screw models driven with Aerotech brush or brushless rotary motors. Travels for our linear tables range from 25 mm to 1.5 meters. Aerotech's tables are utilized in high-performance applications in industrial robots, fiberoptics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component laser machining, electronic manufacturing, and other industrial automation applications. In addition, Aerotech manufactures drives and motion control solutions that perfectly complement our linear tables.
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Constructed of hard coat anodized, aluminum dovetail ways and PTFE bearings, XSlides are suitable for either incrementing or scanning applications, XSlides have a load capacity of 35 lbs.(15.9 kg.) horizontally and 10 lbs. (4.5 kg.) vertically. Straight-line accuracy is 0.001"/10” (0.076 mm/25 cm). Repeatability is 0.0001 inch (0.00025 mm).
With a cross-sectional profile of 1.88"(48 mm) by 1.22"(31 mm), the XSlide comes in eight travel lengths from 2" (5 cm) to 30"(75 cm). Each slide includes integrated limit switches and will accept either NEMA 17 or NEMA 23 motors. Maximum input shaft speed is 30 revs/sec.
XSlide’s can be easily secured and configured as multiaxis systems using mounting cleats. Durable XSlides have a five year limited warranty and are available as individual components or complete automation solutions including, motors, controllers and supporting framework.
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Aerotech photonics and fiberoptics nanopositioners are perfect for the high-volume manufacture of photonics and fiberoptics components and systems. Our fiberoptics positioning systems utilize Aerotech%u2019s own brushless linear servomotors for the maximum performance in the most compact package. We manufacture many models of drives and motion controllers to provide a complete fiberoptics and photonics manufacturing package that is virtually maintenance-free and available for 24/7 operation. Aerotech nanopositioners feature the highest closed-loop resolution available with up to six axes of coordinated motion.
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The SR stage is a compact, small footprint, open type positioning stage. It is used in closed loop positioning applications that require high speed and high accelerations of lighter loads.
The ironless core coil assembly has no magnetic attractive force to the stationary magnet assembly, which reduces the load on and increases life of the bearing system.
The low overall weight of the stage makes it ideal as a Y axis (top axis) in a multi-axis system. The lower moving mass of the stage allows for much higher accelerations of light payloads.
The cable carrier is oversized to allow for passage of customer payload cables and hoses. The back of the cable carrier can be easily removed and reattached to route through additional cables.
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NB4 linear stages are designed for a variety of applications in research and other industrial areas requiring precision positioning such as in semiconductor processing, fiber optics manufacturing and biotech automation.
For more reliability and durability, the guide rods and leadscrew are protected with a strong machined cover and the encoder is mounted internally directly to the leadscrew rather than being exposed to shock and contamination when mounted in the rear of the motor.
All NB4 series linear stages are machined from 6061 aluminum alloy to provide a light yet stiff and stable stage.
The drive system utilizes a stainless steel ACME leadscrew with internally lubricated plastic drive nut. The drive nut offers zero backlash operation that automatically adjusts for wear to insure zero backlash for the life of the stage.
The use linear guide rods provide a smooth motion. Since the carriage is supported over the entire travel of the stage, a good cantilevered load capacity can be achieved.
Separate connectors for motor power and limit/encoder signals are provided for ease of operation. Integrated limit switches and a high torque size 17 stepper motor are supplied as standard items.
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Stages are designed for motion systems that require both high dynamics and high repeatability.
Construction: Stage consist of linear motor built on aluminium profile with linear guideways, and measuring system (magnet encoder) The linear motor consist of forcer with electromagnetic modules and magnet way. The magnet way is fixed on the aluminium profile. The forcer is assembled on the carriage that is destined for installation of user's mechanisms or for joining in more complexity coordinate system.
Advantages:
1. Complete solution for one-axis travel
2. Direct drive (gearless) guarantee backlash-free and smooth (without vibration) motion for long distance
3. High dynamics, accuracy and resolution.
4. Maximum stroke up to 8 m.
5. Modular structure, easy assembling several stages to gantry system.
6. Built-in position encoder.
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Dynamic Structures and Materials (DSM) offers custom design capabilities for rotary and linear flexure-guided stages required for precision motion control and positioning applications and for challenging environments. DSM's flexure mechanism designs are used in unique positioning applications where backlash- and stiction-free performance are critical.
The 3-axis optomechanical positioning mount pictured here is a representative example of DSM's design capabilities for flexure-guided stage design. A custom, multi-axis design required three axes of flexure-guided motion for a 4 kg payload. The design requirements included ± 2 mm of linear travel adjustment in one axis and ± 2° of rotational adjustment in two additional axes. The assembly's design minimizes undesirable motion during temperature transients and shock loading.
DSM designed the optical mount using a titanium and aluminum construction. Fine thread screw adjusters provide manual adjustment capability, although the design lends itself to being easily reconfigured for motorized position adjustment. Pre-load springs and flexure pivots provide return force.
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SKF positioning systems designed a series of compact cross tables that are driven with ironless linearmotors. High guiding / positioning accuracy and high dynamic lead to a perfect solution for wafer measurement. The free area through the whole unit optimizes the mounting position of the measurement device.
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- Smallest Linear Slide with High-Speed Linear Motor Drive
- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 nm
- Self-Locking
- XY-Combinations Available
- 20,000 h MTBF
- Vacuum Versions to 10-7 hPa
PILine® - Ultimate Motion in the Smallest Package:
PILine® M-661- and M-662-series piezo motor linear slides are the smallest high-speed piezo-motor-driven translation stages currently available on the market.
Working Principle:
M-661 and M-662 linear stages have a new, patented, ultrasonic drive developed by PI. The highly compact, integrated P-661 piezomotor drive can provide accelerations of up to 20 g and velocities of 500 mm/s and more, together with high resolution and holding force. Because the ceramic stator is pressed against a slider of the stage, piezomotors resist motion with an intrinsic holding force when the stage is at rest. The result is very high position stability without the heat dissipation common with conventional linear motors. Furthermore, there are no gears, leadscrews or other mechanical components to contribute play or backlash.
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T-LSM Series Miniature Motorized Linear Stages
* 25 to 200 mm travel (custom options available)
* Built-in controllers
* Very compact with high speed, thrust and accuracy
* Mount in XYZ configuration without any additional hardware
* Several units daisy-chain to a single serial port
Description
Zaber's T-LSM series devices are computer-controlled motorized linear stages with high thrust and speed capabilities and a very compact size. They are stand-alone units requiring only a standard 15V power supply. A potentiometer knob at the end of the unit permits smooth manual control; turn it fully to get maximum speed. These slides connect to the RS-232 port of any computer and can be daisy-chained with up to 254 units per chain. They can also be chained with any other T-Series products. Convenient 6-pin mini din cables on the unit allow for direct interconnection between units in close proximity. For longer distances, a standard cable extension can be used.
At only 21 mm high, these miniature stages are excellent for applications where a small profile is required. The T-LSM's innovative design allows speeds up to 8 mm/s and loads up to 10 kg. Like all Zaber's products, the T-LSM series is designed to be 'plug and play' and very easy to set-up and operate. If you are considering a multi-axis system, in the XY configuration these stages make excellent microscope stages. Adding a T-JOY3 Joystick Controller allows manual control of both x and y or xyz axes from a single interface as well as allowing microscope stage positions to be saved and recalled at the touch of a button.
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Aerotech air bearings are perfect in semiconductor equipment, fiberoptics, photonics, and other critical industrial automation applications. Our air bearings incorporate an active preload on both vertical and horizontal surfaces. Opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air bearing surface that distributes the load over a large surface area, results in outstanding stiffness that is ideal for heavy or offset loading.
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Rotary-linear tables are combinations of the proven rotary table series
FIBROTAKT,
FIBRODYN,
FIBROPLAN,
FIBROMAX or
FIBROTOR
and one linear axis
in various versions and designs
Transport loads up to 100t
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ABTech inc offers a full line of ultra-precision air bearing linear stages for applications requiring ultra-precision linear motion, such as linear straightness measurement, linear positioning, high-velocity, ultra-smooth, constant velocity and linear systems requiring no static friction. Standard slide and carriage designs or custom engineered solutions for customer specific application.
LAB series linear air bearing stages are ideal modular components for wafer scanning systems, computer-to-plate systems, linear measurement and vision systems, and pick-and-place production automation where precision positioning is required.
ABTech's modular design approach and full engineering services can respond quickly to provide a solution to your O.E.M. needs for ultra-precision frictionless linear motion.
Linear Air Bearing (LAB) Series
*Ultra-smooth motion with no static friction
*Two accuracy grades for cost effective design
*High load capacity and stiffness with low air consumption
*Magnetic or vacuum preloaded or fully constrained carriages (tool mount area)
*Dovetail, rectangular and square box style rail configurations
*Aluminum, stainless steel, granite and ceramic rail options
*Fully supported or end supported rail mounting
*Vertical or horizontal configuration
*Several sizes and travel lengths available
*Available with multiple carriages on common rail
*Stackable mounting configurations
*Standard or custom bolt hole sizes and patterns for tool fixturing
*Optional motor drives, encoders, drive amplifiers and controllers
Accuracy Class:
A1: 5.0µ”/inch (0.125µm/25.4mm)
A2: 15.0µ”/inch (0.375µm/25.4mm)
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X-Theta Air Bearing Stage
Ultra-Smooth Motorized Rotary & Linear Motion -- Ideal for Wafer Scanning!
ABTech inc's X-Theta stage combines ultra-precision rotary and linear air bearings with DC brushless motors and high resolution non-contact encoders to produce the ultimate smooth moving stage. Ideally suited for wafer scanning machine applications.
These stages are designed for cleanroom environments, incorporating appropriate materials, parts cleaning and captured exhaust. This feature allows the air bearing exhaust to be drawn to a common port, where a vacuum supply can be connected to take the exhaust flow away from the work area. This is critical in some applications where particle flow around work surfaces may cause contamination.
Features:
- X-axis: magnetically preloaded linear air bearing (MLAB7750)
- Theta axis: fully constrained rotary air bearing (AT150/200-DD)
- Contained exhaust feature
- Cleanroom compatible
- Ultra-smooth motion, no static friction
- Linear & rotary DC brushless motors
- High resolution encoders
- Total non-contact component design - "no parts to wear"
- Intermediate vacuum chuck worktable with internal porting
- Low air consumption
- Custom tooling and fixturing design and manufacturing
- Turn-key systems available for O.E.M.s
- Brush ring available for electrical grounding of rotating components
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