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Nano Linear Stage PT 30-5-MSI
The Nano Linear Stage has a piezo inertial drive. With a travel in the millimetre range and steps in the nanometer range, it is suitable for manifold applications. A built-on miniature measuring system enables highest positioning accuracy and repeatability. A reference point is included in the glass scale. The basic components of the linear stage are made of highstrength aluminium. Due to a black anodized coating, the surface is protected and reflexion-poor. In order to ensure a high load capacity and a long life time, two preloaded linear ball bearing guides are integrated. Several PT 30-5-MSI can be mounted together and build multiaxis combinations. Due to the highly flexible connecting cable, additional forces are reduced, leading to a precise positioning motion. For the mounting of the nanopositioners, the mounting plate NMP 50 is recommended. It is available as accessory. In order to operate the nanopositioners with measuring system, the nano position control NPS 03 has to be used. The complete system is pluggable and ready for connection.
- high power density on little space
- with build-on measuring system
- precise positioning in the nanometer range
- travel in the millimeter range
- particularly high load capacity due to the preloaded linear ball bearing guides
Option
- version for use in vacuum |
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| Rated to 10-10 Torr, this multi-axis stage uses high resolution piezo motors on the X/Y axes to eliminate servo dither and provide a .1µm resolution. The system features high resolution and smooth scanning capability allowing it to move a 300mm wafer under an analyzing sensor inside a vacuum chamber. The X/Y sits on top of a Z wedge stage to provide vertical positioning, controlling the distance to the object. This completely integrated system features servo and piezo motor amplifiers and a 3-axis motion controller. |
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| The NEW Rotation Stage DT-80 R rotation stages of the 80 structural series are a low cost alternative to the MICOS DT-65 N and PRS-110 high precision rotation stages. They are mainly applied for simple positioning tasks and enlarge the range of our low cost translation stages of the 80 structural series. The belt driven DT-80 R rotation stage allows a much higher speed of rotation in comparison to other stages. The continuous aperture of 40 mm diameter is suitable for many applications in the range of microscopy. The belt driven combination is prestressed with nearly zero backlash and produces a smooth move. Structural series 80 rotation stages are directly driven by 2-phase micro-step (SMC-series) or MICOS SMC Pollux motor- controller combination. DT-80 R rotation stages are equipped with reference switches (HLS). |
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The RV Series rotation stages provide high-precision angular positioning accuracy combined with high load capacity. There are five stage sizes and six drive configurations available, optimizing load capacity, torque, speed and resolution for a variety of operating conditions.
All RV stages are constructed of tool steel, with rotation accuracy ensured by ground bearing surfaces. A double row of preloaded bearings allows for high off-center loads in a reduced footprint. The single monolithic design offers improved stiffness without compromising dynamic performance. The largest RV stage can bear up to 6500N or rotate up to 80 °/s, while maintaining less than 4 um eccentricity.
Precise rotation is ensured by a precision ground and hardened worm gear. A rotary encoder mounted on the worm gear shaft provides 0.001° position feedback resolution (0.00025° resolution with RVS80CC) on the standard configurations. For more demanding applications, the HAT and HAHLT options are available on the RV120 to RV350 models. These stages are equipped with a direct reading optical encoder attached to the moving platen for superior resolution and accuracy.
The selection of the drive configuration should be based on the precision and speed requirements relative to the inertia of the payload.
• Precision 80–350 mm diameter rotation stages
• Monolithic design ensures high structural stiffness
• Ideal for high-load application
• High-accuracy versions with direct reading encoder and better than 0.0001° (0.36 arcsec) resolution |
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Rotary Measuring Stage DMT 130
This precision rotary stage allows unlimited azimuth at resolutions of less than one angular minute. It is suitable for horizontal and vertical rotational axes.
The precision ball bearing and the worm gear are preloaded.
The rotary stage DMT 130 is available with different motors.
All aluminium parts have a top quality black anodised protective coating.
- deformation-resistant aluminium alloy
- precision angular contact ball bearing
- preloaded worm gear
- rotary table with aperture
- electronical reference switch (Hall-effect)
- with step motor or DC servo motor |
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D E S C R I P T I O N
Micro Stages MT-55 are especially suited for the integration in difficult accessible places and limited space conditions. MT-55 can be employed for precise and high-resolution positioning of small construction parts such as fibres, optics and laser diodes. MT-55 can be assembled without problems to XYZ-modules. MT-55 is equipped with zero-backlash ball screws and precision lead screw with 0.25 mm pitch. The Micro Stage MT-55 is driven by a zero-backlash toothed belt and DC-, or 2-phase-step motor with zero-backlash gear. Quiet smooth move and highest resolution up to 0.0137µm is guaranteed (SMC). The travel range is 5 mm. MT-55 is provided with a center hole of 15 mm diameter, so it is well suited for all tasks of microscopy. Two limit switches prevent damage from accidental overtravel. The XY-assembly can only be made at plant and must be indicated when ordering. (Code: 6219-9-X20). |
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D E S C R I P T I O N
Linear Piezo Stages LPS-30 are suited for precise positioning of small construction parts. They are ideal for a variety of applications, such as Micro,-Nanotechnology, Bio Technology, Microscopy, Quality control and R&D. LPS-30 stages are working in open or closed loop mode. Resolution up to 50 nm are available. The modules can be space-saving assembled to XY-systems, with Elevation Piezo Stage EPS-30 to XYZ- systems. Linear Piezo Stages LPS- 30 is equipped with prestressed zero-backlash ball bearings. Directly driven with a piezo driven step motor without any backlash. The travel range is 6.5 mm or 13mm. XY-assembly can only be made with a special mounting adapter and must be ordered ( Order No. 5800-9-0001 /2 ). Linear Piezo Stages LPS- 30 are specially designed for clean room, vacuum and cryonic applications. Customized designs for OEM are possible. |
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Flexure guided piezo stage positioners are used in a variety of applications from semiconductor manufacturing to precision machining.
PI introduced the first line of piezoelectric actuators more than 35 years ago. The technology's unique features such as: responsiveness; stiffness; life time and infinite resolution, have opened many markets since then, from semiconductor testing to precision machining. Typical piezo tools for precision machining are equipped with special waterproof casings which also provide the mechanical interface to the tooling machine and the tool servo.
Integrated metrology systems feature resolution in the nanometer and sub-nanometer range for closed-loop operation with digital or analog motion controllers. Flexure guiding mechanisms and motion amplifiers provide long traveling ranges and protect the piezo ceramics from off-axis forces.
PI piezo actuator systems are used throughout the world, often in applications that run 24 hours a day, seven days a week. They improve the manufacturing precision of optics, crank shafts, bearings, cylinders, pistons, etc. in crucial processes such as diamond turning, milling, grinding, out-of-round boring or wear-compensation of tools.
Custom-manufactured high-performace piezoceramic actuators provide lifetimes of billions of cycles. Power amplifiers with energy recovery and 2000 W peak power are available for high-dynamics applications. |
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Hexapod 6-Axis Precision Positioning Stage
- 6 Degrees of Freedom
- Extremely Compact
- Travel Ranges to 45 mm (linear), 25° (rotation)
- Load Capacity to 10 kg, Self Locking Version
- Resolution to 7 nm
- Min. Incremental Motion to 300 nm
- Repeatability ±0.5 µm
- Velocity to 25 mm/sec
- Vacuum-Compatible Versions Available
The M-824 is the ideal micropositioning positioning stage for all complex positioning tasks which depend on high speed and accuracy in six independent axes. In addition to positioning all axes, it allows the user to define a center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command. |
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| Internal anti-backlash leadscrew drives ball slide or crossed roller slide assemblies. Available in one two or three axes. shaft coupling and motor mount included. |
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- Versatile and compact modular-component design
- Carousel or Over-Under working positions
- Precision machined cast iron chemical-nickel plated links
- Precision chordal compensation cams
- High station-to-station accuracy
- Fast intermittent motion
- Vibration free
- Custom index-distance and custom motion available
- Custom options available, including: machined main-frame, line-shafts, cams, synchronized parts-handlers and auxiliary index drives, custom chassis, etc.
- CDS can design and build machine sub-systems to suit customers needs |
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* Precision ballscrew
* Compact three element block design
* High bearing accuracy
* Absolute zero backlash
* High stability
* Low running noise
* Long life
* Suitable for continuous operation |
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ALIO has developed ultra high precision rotary stages to meet and exceed today's demand for high precision motion.
Mechanical Rotary Stages:
Mechanical bearings rotary stages have been design with crossed roller bearings for improved stiffness for off set loads and rotational precision. The ALIO attention to materials and machining is maintained in the rotary product line as with the linear products making sure the bearings and metal are located in ultra machined parallel surfaces. (Notice the precision lands on the top of the AI-80R-D picture.)
ALIO stages have a standard 0.2 arc second resolution with the ALIO supplier motion controllers. Typical standard mechanical crossed roller bearings are rated at 20 microns or radial and axial runout with optional 6 microns is also available. |
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| The 300 series tables feature a rigid pair of quality angular contact bearings which produce smooth table top rotation. The low backlash precision worm gear drive provides exceptional accuracy and repeatability. All aluminum components have a black anodized finish and each table can have either a NEMA 23 or 34 motor mount attached. Threaded steel inserts in the table top provide for easy mounting of the user load while the 0.75 inch (19 mm) through hole provides easy access from below. |
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Model SM46C:
- No pit required
- 5 cm high at table top
- 800 pound running load
- Non-slip drive belt
- Cable access between turntable top and bottom
- Fiber optic interface
- Self-cleaning, fixed rollers
- Non-conductive
- 4 foot diameter
- Motor box / table separation optional and customer specified
- 1 degree position accuracy
- Electrically shielded motor box
- Maintenance free
- Indoor / outdoor
- Variable speed standard
Model SM2015C:
- 2m diameter
- 3 inches high at table top
- 1500 pound running load
- Same features as SM46C
Model FS241:
- 24" diameter rotating deck
- 100 pound (45 kg) EUT capacity
- No metal parts above motorbox
- Variable Speed
- Remote motorbox option
- Customer specified height
- Fiber optic interface
- Indoor / outdoor
Flush Mount Turntables:
- Advanced, low maintenance grounding scheme
- Exceeds site attenuation requirements
- Fiber optic interface
- All metal
- Precision - 1 degree (greater precision optional)
- Manual and remote operation
- Gear driven
- Scan or continuous rotation
- Low maintenance
- Adjustable height
- Variable speed optional
- Pit ring with self-cleaning ground plane interface
- Positioning switch located at turntable
- Full line of standard models
- Custom sizes available
- Optional deck mounted LISNs and Power Receptacles |
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Presto offers two types of "stand alone" turntables: the Low Profile Turntable (LPT) and the Presto Ring Floor Mount Turntable (RFT).
The LPT sits on the floor and has a tapered edge to allow hand pallet trucks to roll up onto it and place or remove a pallet. |
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Principle:
Automatic immobilization of the plate thanks to a pawn of indexing with integrated non-return system.
- Automatic Indexing and desindexage
- from 2 to 20 positions
- of 180 with 180° between 2 positions
- Different Angles between the indexings
- Facility of installation and use
- Total Safety operator
- Simplicity of the system |
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| ... products without technical information |
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