Piezoresistive MEMS pressure sensor
max. 1 000 bar | SE103 BCM SENSOR TECHNOLOGIES bvba

Made from high quality silicon wafer of 4" diameter, BCM SE103 sensor dies are in mass production by means of Micro-
Electro-Mechanical System (MEMS) technology. Based on piezoresistive effect, BCM SE103 pressure sensor dies can
measure the pressure concerned on its surface. The back side of a SE103 die is a pressure chamber, it can be sealed
with glass to measure sealed gauge pressure or absolute pressure. If the sealed glass is with a vent, the dies are used
to measure gauge or differential pressure.
The pressure ranges of SE103 are from 0-200 mbarG up to 0-1000 barA, in the form of gauge(or differential (diff.))
pressure or absolute pressure. The measuring accuracy is up to 0.25%fso (fso = full scale output). The output signal is
Wheatstone bridge output in millivolt. For bridge excitation, constant current (1 mA) or constant voltage (5-10 Vdc)
excitation method is available on request.