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CAMECA
Group: AMETEK Materials Analysis Division
 

Secondary ion mass spectrometer (SIMS)
SIMS 4550 CAMECA

  • secondary ion mass spectrometer (SIMS) SIMS 4550 CAMECA
Quadrupole SIMS Microprobe for dopant depth profiling and thin layer analysis in semiconductors.

The CAMECA SIMS 4550 offers extended capabilities for ultra shallow depth profiling, trace element and composition measurements of thin layers in Si, high-k, SiGe and other compound materials such as III-V for optical devices.

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standListOtherProduct www di En 2012-05-21-23