Tomographic atom probe (TAP)
LA-WATAP
CAMECA
Laser-Assisted 3D Atom Probe for Materials & Semiconductors
The CAMECA LA-WATAP is a high performance Tomographic (or 3D) Atom Probe, providing quantitative atomic scale 3D elemental mapping of chemical heterogeneities in materials.
The LA-WATAP offers the following key advantages:
- Analysis of semiconductor materials with near-atomic depth resolution thanks to flexible (IR / visible / UV) ultrafast (400fs) laser setup.
- Excellent mass resolution even on low thermal conductivity materials.
- Large area of analysis (up to 100 nm in diameter) for a better statistics on composition measurements.
- Fast acquisition rate: ~15 min. needed for collecting 1E6 atoms.
- Best quantitative results with the exclusive Advanced Delay Line Detector and its benchmark multi-hit performance.
- Flexible and fast dedicated FIM (Field Ion Microscopy) detector for metallurgical applications.
LARGE FIELD OF VIEW
The LA-WATAP typically records volumes of 50-100nm diameter by 100-200nm depth, resulting in files of several tens of millions ions, in a few hours (depending on requested evaporation flux that is sample-dependent).
FLEXIBLE LASER SET-UP
The response of a material under Laser illumination depends on its nature, its shape and on the wavelength of the Laser. The LA-WATAP offers flexible Laser setup, ensuring optimized analysis conditions for all materials. The operator can easily select the most appropriate wavelength for any given sample: I.R. (1030nm), visible (515nm), or U.V. (343nm).
